Clean Robot - List of Manufacturers, Suppliers, Companies and Products

Clean Robot "STHR4000 Series"

A twin-arm robot optimal for wafer transport in semiconductor manufacturing equipment!

The "STHR4000 Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. Equipped with two arms, it enables quick wafer exchanges and is primarily suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations available in two sizes: 95mm and 156mm - Z-axis variations available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Adoption of twin arms reduces wafer exchange time - Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

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Clean Robot "SWHR3156 Series"

A waterproof clean robot ideal for wafer transport in acidic and alkaline environments!

The "SWHR3156 series" is a waterproof clean robot with a 3-axis cylindrical coordinate system, equipped with a flip and edge grip function, compatible with 300mm wafers. It has an IP64 protection rating and is suitable for wafer transport in acidic and alkaline atmospheres during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variation: 156mm - Z-axis variation: 200mm and 300mm - Load capacity: 3kgf or less, calculated at the third joint of the arm - The arm section is coated with Teflon for corrosion resistance - The arm joint structure uses V seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

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Clean Robot "SCR3100S-PM Series"

A clean robot that allows for miniaturization of device layout!

The "SCR3100S-PM series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. Its small footprint makes it suitable for transporting small-diameter wafers within semiconductor manufacturing equipment and inspection devices, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 - Arm variation: 100mm - Z-axis variation: 200mm and 300mm - Load capacity: 0.5kgf or less at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

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Clean Robot 'SSCR3115S Series'

A clean robot that achieves a small footprint and lightweight design!

The "SSCR3115S series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It allows for a compact device layout. Additionally, due to its small footprint and lightweight design, it is ideal for transporting small wafers inside semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Maximum load capacity is 0.2 kgf or less at the third joint of the arm (work only) - Equipped with a motion monitor - Control methods include RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

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Clean Robot "SCR3000CS Series"

A clean robot that is optimal for wafer transport in semiconductor manufacturing equipment, such as inspection devices!

The "SCR3000CS Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is suitable for wafer transport within semiconductor equipment and inspection devices, and can accommodate optimal chucks tailored to the transported items and equipment layout. Additionally, our company offers a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations: 100mm, 130mm, 160mm, 200mm - Z-axis variations: selectable from 200mm onwards - Maximum load capacity: 3kgf or less based on the third joint of the arm - Equipped with operation monitoring - Control methods: RS232C and parallel photo I/O *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

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Clean Robot "STCR4000S Series"

A clean robot suitable for wafer transport in semiconductor manufacturing equipment and inspection devices!

The "STCR4000S Series" is a four-axis cylindrical coordinate clean robot designed for super clean rooms. With its two arms, it enables quick wafer exchanges. It is suitable for wafer transport within semiconductor manufacturing equipment and inspection devices. We also offer a variety of clean robots, so please feel free to consult with us. 【Features】 ■ Arm variations can be selected from 100mm and above ■ Z-axis variations can be selected from 200mm and above ■ Load capacity is 3kgf or less based on the third joint of the arm ■ Adoption of twin arms reduces wafer exchange time ■ Base type and flange type can be selected according to the equipment layout *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Inspection robot

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Clean Robot "SHR3000 Series"

Ideal for wafer transport in semiconductor manufacturing equipment and similar environments!

The "SHR3000 Series" is a three-axis cylindrical coordinate clean robot designed for super clean rooms. It is optimal for wafer transport within semiconductor manufacturing equipment and inspection devices. Additionally, it can accommodate optimal chucks tailored to the transported items and equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Arm variations can be selected from 100mm - Z-axis variations are available in 200mm and 300mm - Load capacity is 3kgf or less when calculated at the third joint of the arm - Base type and flange type can be selected according to the equipment layout - Equipped with a motion monitor *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
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Clean Robot "STWHR4156 Series"

Ideal for wafer transport in acidic and alkaline mist environments!

The "STWHR4156 series" is a waterproof twin-arm 4-axis cylindrical coordinate clean robot. It is suitable for wafer transport in an acidic and alkaline mist atmosphere during the LSI manufacturing process. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 ■ Arm variation is 156mm ■ Z-axis variation is 200mm and 300mm ■ Load capacity is 3kgf or less when calculated at the third joint of the arm ■ The arm section is coated with Teflon to ensure corrosion resistance ■ The arm joint section uses V-seals for waterproofing *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
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Clean Robot 'SSCR2090S Series'

Clean robot for small wafer paths!

The "SSCR2090S Series" is a two-axis cylindrical coordinate clean robot designed for super clean rooms. With its compact footprint and lightweight design, it is suitable for small wafer transport within semiconductor manufacturing equipment, inspection equipment, and LED manufacturing equipment, allowing for a more compact equipment layout. We also offer a variety of clean robots, so please feel free to consult us. 【Features】 - Load capacity is 0.1 kgf or less (work only) when converted to the third joint of the arm - Equipped with operation monitoring - Control method is RS232C and parallel photo I/O - All axes use two-phase stepping motors - High-speed and high-precision wafer transport through S-curve acceleration and deceleration control *For more details, please refer to the catalog or feel free to contact us.

Company：ジェーイーエル
Price：Other

Other conveying devices
Other factory equipment and parts

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Clean Robot - List of Manufacturers, Suppliers, Companies and Products

Clean Robot Product List